O3
Cleaning UV System
The optical cleaning technology that uses
deep UV is called UV/O₃cleaning because it
uses UV and ozone that is discharged by UV.
UV/O₃cleaning technology is dry
cleaning that doesn’t use any medicine so
it is very effective for precision cleaning. Its
advantage is that it doesn’t damage the
surface of a subject. It is being settled down as
an important technology for cleaning
semiconductor wafer and TFT glass board, and for
reforming the surface.
UV/O₃cleaning is applied under normal temperature.
It is easy to operate and treat.
And further, it doesn’t cost a lot. It is
very effective for removing low-concentrated pollutants so it can bring
ultra-clean surfaces.
Application
1. Hydrophilic treatment and reforming
for glass surfaces.
2. Hydrophilic treatment and reforming for metal surfaces.
3. Reforming register surfaces.
4. Removing the remaining films after
register development.
5. Washing register.
6. Annealing and reforming oxidation.
7. Creating oxidation.
Product Videos:https://www.youtube.com/watch?v=qm7mx8y3P0c
Company Website:http://www.jmuv.co.kr
Inquiry:mmdsmv@naver.com
